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US 2018/0019467 A1Published application
Manufacturing Apparatus And Method For Making Silicon Nanowires On Carbon Based Powders For Use In Batteries
AssigneeOneD Material, Inc.
InventorsYimin Zhu, Vincent Pluvinage
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Abstract
Manufacturing apparatus, systems and method of making silicon (Si) nanowires on carbon based powders, such as graphite, that may be used as anodes in lithium ion batteries are provided. In some embodiments, an inventive tumbler reactor and chemical vapor deposition (CVD) system and method for growing silicon nanowires on carbon based powders in scaled up quantities to provide production scale anodes for the battery industry are described.
Claims27
A method of manufacturing silicon nanowires, comprising:
- growing silicon nanowires on carbon based powders by chemical vapor deposition of a silicon containing precursor in a CVD reactor, wherein the conversion of the silicon containing precursor into silicon nanowires is at least 30%, the CVD reactor configured to process at least 1 kg of the carbon based powders per batch, and
- wherein the growing produces carbon-based silicon nanowire composite powders comprising carbon based powders with silicon nanowires attached at one end to the carbon based powders and having a silicon nanowire density of at least 4% silicon to carbon weight ratio.
A method of manufacturing silicon nanowires, comprising:
- loading carbon based powder in a CVD chamber,
- injecting silicon containing gas into the CVD chamber;
- and
- growing silicon nanowires on the carbon based powders by chemical vapor deposition wherein the silicon nanowires are attached to the carbon powders at one end of the silicon nanowire to form carbon-based silicon nanowire composite powders, wherein conversion of the silicon containing gas into the silicon nanowires is at least 30%, wherein at least 1 kg of the carbon-based silicon nanowire composite powders are produced per batch, and wherein the carbon-based silicon nanowire composite powders have a silicon nanowire density of at least 4 wt. % silicon to carbon-silicon composite.
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Dependencies are inferred from the claim text.