Formation of carbon nanotube-containing devices
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Bharat Kumar, George S. Tulevski
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Abstract
A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
Claims20
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound, wherein the carbon nanotubes have a length in the range of about 100 nm to about 2000 nm.
A carbon nanotube based device, comprising:
- a semiconductor substrate;
- a metal oxide layer on the semiconductor substrate;
- a monolayer of a functionalized bifunctional compound bonded to the metal oxide layer, wherein the functionalized bifunctional compound includes a hydroxamic acid moiety at one end of the functionalized bifunctional compound and a diazonium moiety on the opposite end of the functionalized bifunctional compound;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound, wherein the carbon nanotubes have a length in the range of about 100 nm to about 2000 nm.
Dependencies are inferred from the claim text.