Formation of carbon nanotube-containing devices
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Bharat Kumar, George S. Tulevski
Life of this patent
Estimating the term…
Abstract
A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
Claims20
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands;
- a monolayer of a functionalized bifunctional compound in the trench, wherein the functionalized bifunctional compound is selectively chemically adsorbed onto the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the functionalized bifunctional compound forming the monolayer.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands;
- a monolayer in the trench, wherein the monolayer is formed by a functionalized bifunctional compound having a first reactive moiety and a second reactive moiety, wherein the first reactive moiety is selectively chemically adsorbed onto exposed portions of the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the second reactive moiety of the functionalized bifunctional compound.
A carbon nanotube based device, comprising:
- a substrate;
- a metal oxide layer on the substrate;
- a plurality of non-metal oxide islands on the metal oxide layer forming a trench between the non-metal oxide islands;
- a monolayer of a functionalized bifunctional compound having a first reactive moiety and a second reactive moiety in the trench, wherein the first reactive moiety is selectively chemically adsorbed onto exposed portions of the metal oxide layer;
- and
- a plurality of carbon nanotubes chemically bonded to the second reactive moiety of the functionalized bifunctional compound, wherein the carbon nanotubes are aligned in a direction parallel to a long axis of the trench.
Dependencies are inferred from the claim text.