Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJae Wan PARK, Ju Eel MUN, Seung Ki KANG, In Hyun HWANG
Life of this patent
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Abstract
A deposition apparatus includes a chamber, a first stage and a second stage for supporting substrates within the chamber, an evaporating source assembly moving a first stage area corresponding to the first stage and a second stage area corresponding to the second stage, and including a plurality of nozzles through which a source material is spurted, and a photographing assembly which is disposed between the first stage and the second stage and photographs the plurality of nozzles.
Claims22
A deposition apparatus, comprising:
- a chamber;
- a first stage and a second stage which respectively support substrates within the chamber;
- an evaporating source assembly which moves between a first stage area corresponding to the first stage and a second stage area corresponding to the second stage, and includes a plurality of nozzles through which a source material is spurted;
- and
- a photographing assembly which is disposed between the first stage and the second stage and photographs the plurality of nozzles.
A method for manufacturing an organic thin film, the method comprising:
- providing a chamber in which a first stage area and a second stage area are defined;
- providing a first stage in the first stage area and a second stage in the second stage area;
- providing an evaporating source assembly including a plurality of nozzles;
- providing substrates respectively on the first stage and the second stage within the chamber;
- controlling, by a driving assembly, the evaporating source assembly to move between the first stage area and the second stage area;
- spurting, by the plurality of nozzles, a source material on the substrates, and
- photographing, by a photographing assembly, the plurality of nozzles.
Dependencies are inferred from the claim text.