Manufacturing method of semiconductor device and semiconductor device
AssigneeRenesas Electronics Corporation
InventorHideki MAKIYAMA
Life of this patent
Estimating the term…
Abstract
The thickness of an insulating film, which will serve as an offset spacer film and is formed in an offset monitor region, is managed as the thickness of an offset spacer film formed over the side wall surface of a gate electrode of an SOTB transistor STR, etc. When the measured thickness is within the tolerance of a standard thickness, standard implantation energy and a standard dose amount are set. When the measured thickness is smaller than the standard thickness, implantation energy and a dose amount, which are respectively lower than the standard values thereof, are set. When the measured thickness is larger than the standard thickness, implantation energy and a dose amount, which are respectively higher than the standard values thereof, are set.
Claims7
1-8. (canceled)
A semiconductor device comprising:
- a substrate having a semiconductor substrate and a semiconductor layer formed over the surface of the semiconductor substrate by interposing a buried insulating film;
- a plurality of regions including a first element formation region and a first monitor region that are defined in the semiconductor layer;
- a first transistor that is formed in the first element formation region and includes a first gate electrode, an extension region, and a first impurity region;
- an offset spacer film formed to cover the side wall surface of the first gate electrode and the extension region;
- and
- an interlayer insulating film formed to cover the first transistor,
- wherein in the first element formation region, the offset spacer film includes a first insulating film first part formed to contact the surface of each of the side wall surface of the first gate electrode and the extension region, and
- wherein in the first monitor region, a first insulating film second part is formed to contact the surface of the semiconductor layer.
12-13. (canceled)
(canceled)
Dependencies are inferred from the claim text.