Magnetic inductor stacks with multilayer isolation layers
AssigneeInternational Business Machines Corporation
InventorsHariklia Deligianni, Bruce B. Doris, Eugene J. O'Sullivan, Naigang Wang
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Abstract
A magnetic laminating structure and process includes alternating layers of a magnetic material and a multilayered insulating material, wherein the multilayered insulating material is intermediate adjacent magnetic material layers and comprises a first insulating layer abutting at least one additional insulating layer, wherein the first insulating layer and the at least one additional insulating layer comprise different dielectric materials and/or are formed by a different deposition process, and wherein the layers of the magnetic material have a cumulative thickness greater than 1 micron.
Claims12
An inductor structure comprising:
- a plurality of metal lines;
- and
- a laminated film stack comprising alternating layers of a magnetic material and a multilayered insulating material enclosing the metal lines, wherein the multilayered insulating material is intermediate adjacent magnetic material layers and comprises a first insulating layer abutting at least one additional insulating layer, and wherein the first insulating layer and the at least one additional insulating layer comprise different dielectric materials and/or are formed by a different deposition process.
10-17. (canceled)
An inductor structure, comprising:
- a laminated film stack comprising alternating layers of a magnetic material and a multilayered insulating material, wherein the multilayered insulating material is intermediate adjacent magnetic material layers and comprises a first insulating layer abutting at least one additional insulating layer, and wherein the first insulating layer and the at least one additional insulating layer comprise different dielectric materials and/or are formed by a different deposition process.
19-20. (canceled)
Dependencies are inferred from the claim text.