Semiconductor device structure and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShou-Zen CHANG, Chi-Ming HUANG, Kai-Chiang WU, Sen-Kuei HSU, Hsin-Yu PAN, Han-Ping PU, Albert WAN
Life of this patent
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Abstract
A semiconductor device structure is provided. The semiconductor device structure includes a first device. The semiconductor device structure includes a conductive element over the first device. The semiconductor device structure includes a first conductive shielding layer between the first device and the conductive element. The first conductive shielding layer has openings, and a maximum width of the opening is less than a wavelength of an energy generated by the first device.
Claims23
A semiconductor device structure, comprising:
- a first device;
- a conductive element over the first device;
- and
- a conductive shielding layer between the first device and the conductive element, wherein the conductive shielding layer has a plurality of openings defined there-through, and a maximum width of the opening is less than a wavelength of an energy generated by the first device.
11-20. (canceled)
A semiconductor device structure, comprising:
- a chip;
- a device over the chip;
- and
- a conductive shielding layer between the chip and the device, wherein the conductive shielding layer has a plurality of openings defined there-through, and a maximum width of the opening is less than a wavelength of an energy generated by the device.
(canceled)
A semiconductor device structure, comprising:
- a device;
- a conductive element over the device;
- and
- a first conductive shielding layer between the device and the conductive element, wherein the first conductive shielding layer has a plurality of first openings defined there-through, a first maximum width of each of the first openings is less than a wavelength of an energy generated by the device, and one of the first openings is between the device and the conductive element.
(canceled)
Dependencies are inferred from the claim text.