Method and structure for flip-chip package reliability monitoring using capacitive sensors groups

A method, comprising:

• providing a flip-chip package comprising a die bonded to a substrate using a bump between the die and the substrate, and at least one pair of capacitive sensors that measures capacitance between each pair of capacitive sensors over time, said pair of capacitive sensors comprising a first sensor formed on a surface of the die and a second sensor formed opposite the first sensor on a surface of the substrate;
• monitoring for and reporting a change in capacitance between each pair of capacitive sensors over time using the at least one pair of capacitive sensors, wherein the change in capacitance is due to a chip-packaging interaction failure;
• and
• creating a sequential inventory of non-critical failures which can be used to create a reliability assessment or diagnostic for the flip-chip package;
• wherein the chip-packaging interaction failure comprises crack formation and propagation in flip-chip package underfill, interfill, solder mask, chip, substrate, interposer, or a combination thereof, delamination of a component of the flip-chip package, warping of the flip-chip package, or a combination thereof;
• wherein the at least one pair of capacitive sensors is a group of capacitor plate pairs or an array of capacitor plate pairs, wherein the group or the array provides spatial localization and propagation information for the failure causing the change in capacitance;
• wherein the at least one pair of capacitive sensors is a component of a monitoring apparatus that can detect and track the initiation and propagation of chip-packaging interaction induced cracking and delamination within the package;
• wherein the monitoring apparatus comprises the at least one pair of capacitive sensors electrically connected to an A/D converter which in turn is electrically connected to a microprocessor;
• wherein the microprocessor calls for a field repair or calls for stress testing upon receiving an electrical signal at a time of a first change in capacitance (SN1);
• wherein the microprocessor is located in the flip-chip package or external to the flip-chip package.