Electrostatic chuck table

A laser processing apparatus comprising:

• an electrostatic chuck table for holding a workpiece;
• and
• a laser beam irradiation unit for forming a modified layer within said workpiece held by said electrostatic chuck table with a laser beam having a wavelength allowing the laser beam to be transmitted through the workpiece;
• wherein said electrostatic chuck table includes:
• a plate-shaped base transmittable with respect to said laser beam having a predetermined wavelength allowing the laser beam to be transmitted through the workpiece, said plate-shaped base having a first surface and a second surface opposite said first surface;
• an electrostatic attraction electrode assembly transmittable with respect to said laser beam having the predetermined wavelength, the electrostatic attraction electrode assembly being formed on the first surface of said base;
• and
• a resin layer transmittable with respect to said laser beam having the predetermined wavelength, the resin layer covering said electrode assembly and providing a holding surface for holding said workpiece thereon;
• wherein said workpiece has a reverse side held on the holding surface of said electrostatic chuck table, and said laser beam is applied from said laser beam irradiation unit to said workpiece from a side of the second surface of said base to form a modified layer within said workpiece.