Locally heated multi-zone substrate support
AssigneeApplied Materials, Inc.
InventorMichael S. COX
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure provide an electrostatic chuck (ESC) having azimuthal temperature control. In one embodiment, the electrostatic chuck includes an insulating base, an encapsulating member disposed on the insulating base, a first plurality of electrodes and a second plurality of electrodes disposed at a first elevation in the encapsulating member, the first plurality of electrodes intervening with the second plurality of electrodes, and a plurality of heating elements disposed at a second elevation in the encapsulating member, the heating elements being arranged in the form of discrete sections.
Claims20
An electrostatic chuck, comprising:
- an insulating base;
- an encapsulating member disposed on the insulating base;
- a first plurality of electrodes and a second plurality of electrodes disposed at a first elevation within the encapsulating member, the first plurality of electrodes and the second plurality of electrodes are alternatingly arranged across a surface of the insulating base;
- and
- a plurality of heating elements disposed at a second elevation in the encapsulating member, the heating elements being arranged in the form of discrete sections.
Dependencies are inferred from the claim text.