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US 2018/0019146 A1Published application
Reticle purging system and method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Jung Huang, Yu-Yao Huang, Shih-Ming Chin
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Abstract
A reticle purging system includes an automated pod opener, a reticle holding device, a reticle transporting device and at least one purging device. The reticle holding device has a reticle occupiable zone thereon. The reticle transporting device is assigned with a transportation path from the automated pod opener to the reticle holding device. The reticle occupiable zone is exposed to the purging device.
Claims20
A reticle purging system, comprising:
- an automated pod opener;
- a reticle holding device having a reticle occupiable zone thereon;
- a reticle transporting device assigned with a transportation path from the automated pod opener to the reticle occupiable zone;
- and
- at least one purging device to which the reticle occupiable zone is exposed.
2 more elements
A reticle purging system, comprising:
- an automated pod opener;
- a reticle holding device having a reticle occupiable zone thereon;
- a reticle transporting device assigned with a transportation path from the automated pod opener to the reticle holding device;
- an image capturing device to which the reticle occupiable zone is exposed;
- a purging device;
- and
- a purging actuator configured to actuate the purging device based on an image captured by the image capturing device.
4 more elements
A reticle purging method, comprising:
- automatedly opening a pod having a reticle therein;
- moving the reticle from the pod onto a reticle holding device;
- capturing an image of the reticle on the reticle holding device by an image capturing device;
- and
- purging the reticle based on the image captured by the image capturing device.
2 more elements
Dependencies are inferred from the claim text.