Laser system and laser annealing apparatus
AssigneesKyushu University, Gigaphoton Inc.
InventorsTomoyuki OHKUBO, Hiroshi IKENOUE, Kouji KAKIZAKI, Yasuhiro KAMBA, Osamu WAKABAYASHI
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Abstract
A laser system may serve as a light source of a laser annealing apparatus that irradiates a workpiece with a pulse laser beam. The laser system may include: a laser apparatus configured to generate the pulse laser beam; a time-domain pulse waveform changing apparatus configured to change time-domain pulse waveform of the pulse laser beam; and a controller configured to receive at least one parameter for generating the time-domain pulse waveform from the laser annealing apparatus and to control the time-domain pulse waveform changing apparatus.
Claims12
A laser system serving as a light source of a laser annealing apparatus that irradiates a workpiece with a pulse laser beam, the laser system comprising:
- a laser apparatus configured to generate the pulse laser beam;
- a time-domain pulse waveform changing apparatus configured to change time-domain pulse waveform of the pulse laser beam;
- and
- a controller configured to receive at least one parameter for generating the time-domain pulse waveform from the laser annealing apparatus and to control the time-domain pulse waveform changing apparatus.
A laser annealing apparatus for irradiating a workpiece with a pulse laser beam, comprising:
- a laser apparatus configured to generate the pulse laser beam;
- a time-domain pulse waveform changing apparatus configured to change time-domain pulse waveform of the pulse laser beam;
- optics configured to irradiate the workpiece with the pulse laser beam;
- a fluence changing unit configured to change fluence of the pulse laser beam on the workpiece;
- and
- a controller configured to control the time-domain pulse waveform changing apparatus and the fluence changing unit based on an irradiation parameter set including at least one parameter for generating the time-domain pulse waveform and a target value of the fluence of the pulse laser beam on the workpiece.
Dependencies are inferred from the claim text.