Plasma equipment for treating powder
AssigneeKorea Basic Science Institute
InventorsDong Chan SEOK, Yong Ho JUNG, Hyun Young JEONG
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AssigneeKorea Basic Science Institute
InventorsDong Chan SEOK, Yong Ho JUNG, Hyun Young JEONG
Estimating the term…
A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a circular surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the circular surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the circular surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the circular surface discharge plasma module.
1-7. (canceled)
A method of processing a powder using a powder surface processing apparatus of a rotary cylindrical surface discharge plasma module:
Dependencies are inferred from the claim text.