Sample observation method and sample observation device

A sample observation method for observing a sample by using a charged particle microscope, the method comprising:

• causing a plurality of detectors arranged at different positions from the sample to detect a secondary electron or a reflected electron generated from a first region of the sample by irradiating and scanning the first region with a charged particle beam;
• generating a plurality of images of the first region for each of the plurality of detectors, based on a signal obtained by causing each of the plurality of detectors arranged at the different positions to detect the secondary electron or the reflected electron;
• calculating a mixing parameter serving as each weight of the plurality of generated images of the first region for each of the plurality of detectors;
• causing the plurality of detectors arranged at the different positions from the sample to detect the secondary electron or the reflected electron generated from a second region by irradiating and scanning the second region inside the first region on the sample with the charged particle beam;
• generating a plurality of images of the second region for each of the plurality of detectors with higher magnification than that of the plurality of images of the first region, based on a signal obtained by causing each of the plurality of detectors arranged at the different positions to detect the secondary electron or the reflected electron;
• generating a mixed image with high magnification in such a way that the plurality of generated images of the second region are mixed with each other using the calculated mixing parameter;
• and
• outputting the generated mixed image with high magnification.

A sample observation device for observing a sample by using a charged particle microscope, the device comprising:

• the charged particle microscope that includes a plurality of detectors arranged at different positions from the sample so that the plurality of detectors detect a secondary electron or a reflected electron generated from the sample by irradiating and scanning the sample with a charged particle beam;
• an image generation unit that generates images of the sample for each of the plurality of detectors, based on a signal obtained by causing each of the plurality of detectors arranged at the different positions of the charged particle microscope to detect the secondary electron or the reflected electron;
• a mixed image generation unit that generates a mixed image by mixing the images of the sample which are generated by the image generation unit for each of the plurality of detectors;
• and
• a display unit that displays the mixed image generated by the mixed image generation unit.