Charged particle instruments
AssigneeNanoscope Services Limited
InventorLloyd PETO
Life of this patent
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Abstract
An apparatus is disclosed for use in a charged particle instrument which defines an inner volume therein. The apparatus comprises an adaptor (22) having a first portion adapted for attachment to a part (20) of a gas injection system (18) of a charged particle instrument which is located within an inner volume of such an instrument; and a second portion arranged to receive a tool (24) adapted for interaction with a sample (14) located in the inner volume of such an instrument.
Claims10
An adaptor for attachment to a nozzle of a gas injection system provided in an inner volume of a charged particle instrument, the adaptor having a first portion adapted for releasable attachment to a nozzle of a gas injection system of a charged particle instrument, which part nozzle is located within an inner volume of such an instrument, and is operable to provide a gas injection function for the charge particle instrument concerned;
- and a second portion adapted to receive a tool adapted for interaction with a sample located in the inner volume of such an instrument, wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system without the provision of further additional apparatus within the inner volume.
A sample interaction apparatus for a charged particle instrument which defines an inner volume therein, the apparatus comprising:
- an adaptor having a first portion adapted for releasable attachment to a nozzle of a gas injection system of a charged particle instrument, which nozzle is located within an inner volume of such an instrument, and is operable to provide a gas injection function for the charge particle instrument concerned;
- and a tool attached to a second portion of the adaptor, the tool being adapted for interaction with a sample located in the inner volume of such an instrument, wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system without the provision of further additional apparatus within the inner volume.
(canceled)
A charged particle instrument comprising:
- a housing defining an inner volume therein;
- a particle source operable to introduce charged particles into the inner volume;
- a particle detector operable to detect particles in the inner volume;
- a sample stage located within the inner volume and adapted to hold a sample;
- a gas injection system including a nozzle which extends into the inner volume, and which is operable to introduce a selected gas into the inner volume;
- an adaptor having a first portion releasably attached to the nozzle of the gas injection system, and a second portion adapted to receive a tool;
- and
- a tool attached to the second portion of the adaptor, the tool being adapted for interaction with a sample located in the inner volume of such an instrument,
- wherein the adaptor provides the tool within the inner volume in addition to the nozzle of such a gas injection system without the provision of further additional apparatus within the inner volume, and
- wherein the sample stage is operable to move a sample located thereon with respect to the tool.
A manipulation tool for a charge particle instrument, the tool being in the form of a needle of a resilient, conductive, non-metallic material.
Dependencies are inferred from the claim text.