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US 2018/0016176 A1Published application
DEVICE FOR MANUFACTURING SiO2-TiO2 BASED GLASS
AssigneeNikon Corporation
InventorsToshio YOSHINARI, Tadahiko SAITO
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Abstract
A device for manufacturing SiO2—TiO2 based glass by growing a glass ingot upon a target by a direct method. The device includes the target, comprising a thermal storage portion that accumulates heat by being preheated, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion in a direction opposite to the glass ingot.
Claims4
A device for manufacturing SiO2—TiO2 based glass by growing a glass ingot upon a target by a direct method, comprising:
- the target, comprising
- a thermal storage portion that accumulates heat by being preheated, and
- a heat insulating portion that suppresses conduction of heat from the thermal storage portion in a direction opposite to the glass ingot.
Dependencies are inferred from the claim text.