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US 2018/0010959 A1Published application
Mems optical device comprising a mems magnetic sensing mechansim and mems light absorbing structure
OwnerBiao Zhang, Tao Juinventors
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Abstract
A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.
Claims15
An optical MEMS device, comprising:
- a substrate;
- a deformable arm connected to a post at an end, wherein the post is connected to said substrate such that the deformable arm is capable of deforming above the substrate;
- a heat plate connected to said deformable arm, wherein the heat plate is capable of absorbing light;
- and
- a magnetic sensing mechanism disposed between the substrate and the heat plate for detecting a displacement of said heat plate, wherein the magnetic sensing mechanism comprises:
- a magnetic source providing magnetic field, wherein the magnetic source moves along with the heat plate;
- and
- a magnetic sensing that is attached to the substrate and capable of sensing the magnetic field from the magnetic source.
5 more elements
An optical MEMS device, comprising:
- a plurality of optical MEMS devices that are formed into a device array, wherein the device array comprises a row and a column;
- and
- wherein the optical MEMS device comprises:
- a substrate;
- a heat plate connected to a deformable arm, wherein the deformable arm is held above the substrate by a post such that the deformable arm is capable of deforming above the substrate;
- and
- a magnetic sending mechanism disposed between the substrate and the heat plate for detecting a displacement of the heat plate in relation to the substrate.
4 more elements
Dependencies are inferred from the claim text.