Vent Attachment System For Micro-Electromechanical Systems
AssigneeW. L. Gore & Associates, Inc.
InventorsAndrew J. Holliday, William A. Kinder
Life of this patent
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Abstract
A method of installing a vent to protect an open port of a micro-electrical mechanical system (MEMS) device, the vent being of the type comprising an environmental barrier membrane attached to a carrier and the vent further being attached to a liner, the method comprising the steps of: (a) feeding the vent to a die attach machine with die ejectors and at least one of a vacuum head and a gripper head; (b) detaching the vent from said liner using the die ejectors; (c) picking up the vent with at least one of the vacuum head and the gripper head of the die attach machine; (d) disposing the vent over the open port of the MEMS device; and (e) securing the vent over the open port of the MEMS device.
Claims10
A method of installing a vent assembly to protect an open port of a micro-electrical mechanical system (MEMS) device, said vent assembly being of the type comprising an environmental barrier membrane attached to a carrier and said vent further being attached to a liner, said method comprising the steps of:
- (a) feeding said vent assembly to a die attach machine with die ejectors and at least one of a vacuum head and a gripper head;
- (b) detaching said vent assembly from said liner using said die ejectors;
- (c) picking up said vent assembly with at least one of said vacuum head and said gripper head of said die attach machine;
- (d) disposing said vent assembly over said open port of said MEMS device;
- and
- (e) securing said vent assembly over said open port of said MEMS device.
10-15. (canceled)
Dependencies are inferred from the claim text.