Deposition mask and manufacturing method

A manufacturing method for a deposition mask comprising a plurality of layers, the deposition mask being for forming of a thin-film pattern of a certain shape on a substrate by deposition, the deposition mask comprising

• a film in which an aperture pattern is formed, the aperture pattern passing through the film, the aperture being with a shape and dimensions corresponding to the thin-film pattern in a pre-established region for formation of the thin-film pattern on the substrate, and
• a metal member that has an aperture part opposite the aperture pattern with a shape and dimension larger than the aperture pattern, the metal member being provided as a thin sheet in intimate contact with one surface of the film on an outside part of the aperture pattern of the film,
• wherein the film, for the metal member, is mutually distanced and distributed into a plurality of divided parts on one surface of the metal member,
• the manufacturing method comprising:
• forming on a surface of a metal sheet to serve as the metal member a resin layer to serve as the film;
• forming a plurality of the aperture parts that pass through the metal sheet;
• and
• forming on the resin layer aperture patterns having shapes and dimensions smaller than the aperture parts and forming a separated film multiply and divided by removal of the resin layer so as to mutually distance and distribute them on one surface of the metal member.

A deposition method comprising:

• performing a deposition by using a deposition mask,
• wherein the deposition mask comprises a plurality of layers, the deposition mask being for forming of a thin-film pattern of a certain shape on a substrate by the deposition, the deposition mask comprising
• a film in which an aperture pattern is formed, the aperture pattern passing through the film, the aperture being with a shape and dimensions corresponding to the thin-film pattern in a pre-established region for formation of the thin-film pattern on the substrate, and
• a metal member that has an aperture part opposite the aperture pattern with a shape and dimension larger than the aperture pattern, the metal member being provided as a thin sheet in intimate contact with one surface of the film on an outside part of the aperture pattern of the film, and
• wherein the film is mutually distanced and distributed into a plurality of divided parts on one surface of the metal member.