Substrate cutting device and substrate cutting method
AssigneeShoda Techtron Corp.
InventorsTetsuya SHIMAMURA, Kazuhiro NAKIRI
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AssigneeShoda Techtron Corp.
InventorsTetsuya SHIMAMURA, Kazuhiro NAKIRI
Estimating the term…
A substrate cutting device includes: a first cutter including a plurality of first rotary blades; a second cutter including a plurality of second rotary blades; a first rotation drive unit for rotationally driving the first cutter; a second rotation drive unit for rotationally driving the second cutter; a cutter support unit; and a phase adjustment unit. The cutter support unit supports the first cutter and the second cutter such that the first and second cutters are radially opposed to each other so that rotation axes thereof are parallel to each other. The phase adjustment unit adjusts a phase of at least one of the first cutter and the second cutter such that each of the second rotary blades is located between two adjacent first rotary blades in an opposing area in which the first cutter and the second cutter are opposed to each other.
A substrate cutting device for cutting a substrate from one surface and the other surface of the substrate, the substrate cutting device comprising:
A substrate cutting method for cutting a substrate from one surface and the other surface of the substrate, the substrate cutting method comprising:
Dependencies are inferred from the claim text.