Methods for the vapor phase deposition of polymer thin films
AssigneeMassachusetts Institute of Technology
InventorsAdam T. Paxson, David C. Borrelli, Kripa K. Varanasi, Karen K. Gleason
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Abstract
Disclosed are methods for forming thin polymeric films on a surface of an article by deposition from the vapor phase. In certain embodiments, the method comprises depositing the polymeric film in situ inside a space or enclosure contained within the article. In other embodiments, the method comprises depositing a film from vapor phase by thermal degradation of an initiator precursor without the need for an external filament.
Claims122
A method of depositing a coating, comprising the steps of:
- providing an article, wherein said article comprises an interior volume, an interior surface, and an exterior surface;
- introducing a gaseous mixture of reagents into the interior volume of the article, wherein said gaseous mixture contacts said interior surface, and said gaseous mixture comprises a unsaturated monomer;
- temporarily confining said gaseous mixture of reagents in the interior volume of the article;
- and
- applying heat to the gaseous mixture of reagents temporarily confined in the interior volume of the article, thereby depositing a coating on said interior surface.
A method of depositing a coating, comprising the steps of:
- providing an article, wherein said article comprises an interior volume, an interior surface, and an exterior surface;
- and
- introducing a heated gaseous mixture of reagents into the interior volume of the article, thereby depositing a coating on said interior surface;
- wherein said heated gaseous mixture is introduced at a temperature from about 50° C. to about 350° C.;
- said heated gaseous mixture contacts said interior surface;
- and said heated gaseous mixture comprises a unsaturated monomer.
A method of depositing a coating, comprising the steps of:
- providing an article and a housing;
- wherein said article comprises an exterior surface;
- said housing comprises an interior surface and an interior volume;
- and said article is positioned within said interior volume of said housing, thereby forming an interstitial volume between said exterior surface of said article and said interior surface of said housing;
- introducing a gaseous mixture of reagents into the interstitial volume, wherein said gaseous mixture contacts said exterior surface of said article, and said gaseous mixture comprises a unsaturated monomer;
- temporarily confining said gaseous mixture of reagents in the interstitial volume;
- and
- applying heat to the gaseous mixture of reagents temporarily confined in the interstitial volume, thereby depositing a coating on said exterior surface of said article.
A method of depositing a coating, comprising the steps of:
- providing an article and a housing;
- wherein said article comprises an exterior surface;
- said housing comprises an interior surface and an interior volume;
- and said article is positioned within said interior volume of said housing, thereby forming an interstitial volume between said exterior surface of said article and said interior surface of said housing;
- introducing a heated gaseous mixture of reagents into the interstitial volume, thereby depositing a coating on said exterior surface of said article;
- wherein said heated gaseous mixture is introduced at a temperature from about 50° C. to about 350° C.;
- said heated gaseous mixture contacts said exterior surface of said article;
- and said heated gaseous mixture comprises a unsaturated monomer.
Dependencies are inferred from the claim text.