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US 2018/0007474 A1Published application
Mems devices and processes
AssigneeCirrus Logic International Semiconductor Ltd.
InventorsScott Lyall CARGILL, Colin Robert JENKINS, Euan James BOYD
Life of this patent
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Abstract
A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
Claims44
A MEMS transducer structure comprising:
- a substrate, the substrate comprising a cavity;
- a membrane layer supported relative to the substrate to provide a flexible membrane;
- wherein a peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity.
A MEMS transducer structure comprising:
- a substrate, the substrate comprising a cavity;
- a membrane layer supported relative to the substrate to provide a flexible membrane, wherein the membrane layer comprises an active central region and a plurality of support arms which extend laterally from the active central region for supporting the active central region of the membrane;
- wherein a peripheral edge of the cavity defines at least first and second perimeter regions that are concave with reference to the center of the cavity.
Dependencies are inferred from the claim text.