Mems device and process
AssigneeCirrus Logic International Semiconductor Ltd.
InventorScott Lyall CARGILL
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Abstract
The application describes MEMS transducers comprising a flexible membrane supported at a supporting edge relative to a substrate and further comprising one or more unbound edges. The shape of the unbound edge is selected so that the flexible membrane tends to bend along more than one bend axis in the region of the supporting edge.
Claims21
A MEMS transducer comprising a flexible membrane supported at a supporting edge relative to a substrate, the flexible membrane comprising a first unbound edge, wherein the first unbound edge traces a path from a first endpoint at, or near, a first end of the supporting edge,
- wherein a first path segment is defined between first and second path points on the first unbound edge,
- and wherein the first path segment traces a path which varies in distance from a straight line path between the first and second path points, the first path segment comprising at least two bendpoints at which the flexible membrane tends to bend in response to a given deflection of the flexible membrane.
A MEMS transducer comprising a flexible membrane supported at a supporting edge relative to a substrate,
- the membrane comprising first and second unbound edges which each extend from an endpoint at, or near, first and second ends of the supporting edge respectively, wherein the first and second unbound edges each trace a path, a path segment being defined between first and second path points on each of the unbound edges, each path segment comprising at least two bendpoints at which the flexible membrane tends to bend in response to a given deflection of the flexible membrane.
A MEMS transducer comprising a membrane having a first membrane region and a second membrane region, wherein the first membrane region is supported at a supporting edge relative to a substrate, the first membrane region being separated from the second membrane region by one or more slits, wherein the slit traces a path from an endpoint at or near the supporting edge, wherein a path segment is defined between said endpoint which forms a first path point and a second path point, wherein the path segment traces a non-linear path.
Dependencies are inferred from the claim text.