Method and Encoding Device for Encoding a Sequence of M-Bit Pattern Words and Outputting a Frame Comprising Corresponding N-Bit Symbols
AssigneeMapper Lithography IP B.V.
InventorMarco Jan-Jaco WIELAND
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Abstract
The present invention relates to a method and encoding device for encoding a sequence of m-bit pattern words and outputting as a bit-stream a frame comprising corresponding n-bit symbols as well as a predetermined comma symbol, wherein m<n, wherein occurrences of false commas in the output bitstream are avoided. The output bitstream may further be optimized based on CID count and DC balance
Claims26
Method of encoding a sequence of m-bit pattern words and outputting as a bit-stream a frame comprising corresponding n-bit symbols as well as a predetermined comma symbol, wherein m<n, said method comprising:
- for each of said m-bit pattern words, generating a corresponding primary n-bit symbol, and if said m-bit pattern word is part of a predetermined set of m-bit pattern words, generating a corresponding alternative n-bit symbol;
- said method comprising:
- selecting the primary symbol in case only a primary symbol was generated, and otherwise:
- i) selecting either said primary symbol or said alternative symbol, wherein if only one of said primary symbol and alternative symbols, when appended to a directly preceding symbol in the output bit-stream, does not form a false comma in said two appended symbols, said one symbol is selected;
- outputting said one selected symbol as a pattern symbol in said output bit-stream;
- each time after having consecutively output multiple pattern symbols in said output bit-stream, outputting said comma symbol in said output bit-stream.
An encoding device configured to receive a sequence of m-bit pattern words and to output as a bit-stream a frame comprising corresponding n-bit symbols as well as a predetermined comma symbol, wherein m<n,
- said encoding device comprising:
- symbol generation circuitry configured to, upon receipt of each m-bit pattern word, generate a corresponding primary n-bit symbol, and further for generating a corresponding alternative n-bit symbol if said received m-bit pattern word is part of a predetermined set of m-bit pattern words;
- symbol selection circuitry adapted for selecting the primary symbol in case only a primary symbol is generated, and otherwise for performing a step of:
- i) selecting either said primary or said alternative symbol, wherein if only one of said primary symbol and alternative symbol, when appended to a directly preceding symbol in the output bit-stream, does not form a false comma in said two appended symbols, said one symbol is selected;
- output circuitry adapted for outputting said one selected symbol as a pattern symbol in said bit-stream, and adapted for outputting a comma symbol in said bit-stream each time after having consecutively output multiple pattern symbols in said output bit-stream.
Dependencies are inferred from the claim text.