Piezoelectric actuator apparatus and control method therefor

Abstract

There is provided a piezoelectric actuator apparatus capable of moving an object to be driven at high velocity by using a piezoelectric element to apply a force to a driving member coupled to the object to be driven by a predetermined frictional force. A piezoelectric actuator apparatus 100 is controlled and driven by inputting a driving voltage having a PWM waveform to a piezoelectric element 101 to which an inductor 27 and a resistor 28 are connected in series. The piezoelectric actuator apparatus 100 increases the velocity of the object to be driven 106 by adjusting respective values of the inductance L0 and the resistance R0 to control damping ratios, amplitudes, and resonance frequencies of the respective vibrations of the piezoelectric mechanical resonance and the piezoelectric electrical resonance, and inducing a response of the driving member 102 closer to sawtooth waves.

Dependencies are inferred from the claim text.