Manufacturing Method of Light-Emitting Element
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsSatoshi Seo, Hiromi Seo, Tsunenori Suzuki, Hiromitsu Kido
Life of this patent
Estimating the term…
Loading patent…
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsSatoshi Seo, Hiromi Seo, Tsunenori Suzuki, Hiromitsu Kido
Estimating the term…
A method for manufacturing a light-emitting element, in particular, a method for manufacturing a light-emitting element with high emission efficiency is provided. In the method for manufacturing a light-emitting element that includes a light-emitting layer containing a host material and a light-emitting material that is an organic compound or an organic metal complex, the light-emitting layer is formed by co-evaporation of the light-emitting material and the host material, and the light-emitting layer is deposited by co-evaporation while the percentage of the partial pressure of carbon dioxide with respect to the total pressure in an evaporation chamber for the co-evaporation is kept higher than that in the air.
A method for manufacturing a light-emitting element comprising a light-emitting layer, the method comprising the step of:
A method for manufacturing a light-emitting element comprising a light-emitting layer over a substrate, the method comprising the step of:
Dependencies are inferred from the claim text.