Piezoelectric package-integrated sensing devices
AssigneeIntel Corporation
InventorsFeras EID, Sasha N. OSTER, Georgios C. DOGIAMIS, Shawna M. LIFF, Adel A. ELSHERBINI, Thomas L. SOUNART, Johanna M. SWAN
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AssigneeIntel Corporation
InventorsFeras EID, Sasha N. OSTER, Georgios C. DOGIAMIS, Shawna M. LIFF, Adel A. ELSHERBINI, Thomas L. SOUNART, Johanna M. SWAN
Estimating the term…
Embodiments of the invention include a sensing device that includes a base structure having a proof mass that is positioned in proximity to a cavity of an organic substrate, a piezoelectric material in contact with a first electrode of the base structure, and a second electrode in contact with the piezoelectric material. The proof mass deflects in response to application of an external force or acceleration and this deflection causes a stress in the piezoelectric material which generates a voltage differential between the first and second electrodes.
A sensing device, comprising:
A package substrate comprising:
A computing device comprising:
Dependencies are inferred from the claim text.