Method for fabricating nanopillar solar cell using graphene
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorMing Zhou
Life of this patent
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Abstract
A method of manufacturing a semiconductor device includes providing a substrate structure. The substrate structure includes a conductive layer and a plurality of nanopillars spaced apart from each other overlying the conductive layer. Each nanopillar includes a first semiconductor layer and a second semiconductor layer on the first semiconductor layer. The first semiconductor layer and the second semiconductor layer have different conductivity types. The method also includes forming a graphene layer overlying the plurality of nanopillars. The graphene layer is connected to each of the plurality of nanopillars.
Claims22
A method of manufacturing a semiconductor device, comprising:
- providing a substrate structure, the substrate structure comprising:
- a conductive layer;
- and
- a plurality of nanopillars spaced apart from each other overlying the conductive layer, each nanopillar comprising a first semiconductor layer and a second semiconductor layer on the first semiconductor layer, the first semiconductor layer and the second semiconductor layer having different conductivity types;
- and
- forming a graphene layer overlying the plurality of nanopillars, the graphene layer being connected to each of the plurality of nanopillars.
A semiconductor device, comprising:
- a conductive layer;
- a plurality of nanopillars spaced apart from each other overlying the conductive layer, each nanopillar comprising a first semiconductor layer and a second semiconductor layer on the first semiconductor layer, the first semiconductor layer being different in conductivity type from the second semiconductor layer;
- and
- a graphene layer overlying the plurality of nanopillars, the graphene layer being connected to each of the plurality of nanopillars.
Dependencies are inferred from the claim text.