FinFET VARACTOR

Abstract

A varactor transistor includes a semiconductor fin having a first conductivity type, a plurality of gate structures separated from each other and surrounding a portion of the semiconductor fin. The plurality of gates structures include a dummy gate structure on an edge of the semiconductor fin, and a first gate structure spaced apart from the dummy gate structure. The dummy gate structure and the gate structure each include a gate insulator layer on a surface portion of the semiconductor fin, a gate on the gate insulator layer, and a spacer on the gate. The varactor transistor also includes a raised source/drain region on the semiconductor fin and between the dummy gate structure and the first gate structure, the raised source/drain region and the gate of the dummy gate structure being electrically connected to a same potential.

Dependencies are inferred from the claim text.