Photogate For Front-Side-Illuminated Infrared Image Sensor and Method of Manufacturing the Same

A method for manufacturing an image sensor, said method comprising:

• providing a substrate;
• forming a plurality of photodetectors of a first type in said substrate, each of photodetectors of said first type being configured to detect light in the visible spectrum and being associated with one of a first plurality of pixels;
• forming a plurality of photodetectors of a second type in said substrate, each of said photodetectors of said second type being configured to detect infrared light and being associated with one of a second plurality of pixels;
• and wherein
• said first plurality of pixels and said second plurality of pixels are arranged to define a sensor array having a plurality of rows and a plurality of columns, said pixels of said second plurality being dispersed among said pixels of said first plurality in said sensor array;
• and
• said step of forming said plurality of photodetectors of said second type comprises forming a plurality of photogates, each of said plurality of photogates being associated with one of said photodetectors of said second type.

An image sensor comprising:

• a substrate;
• and
• a plurality of infrared pixels formed in a front side of said substrate and configured to detect infrared light incident on said front side of said substrate;
• and
• wherein each of said infrared pixels comprises
• a photodiode,
• a region of said substrate free of implants above said photodiode, and
• a photogate formed over said substrate above said photodiode.

An image sensor comprising:

• a substrate;
• a first plurality of pixels formed on said substrate and configured to detect light in the visible spectrum;
• a second plurality of pixels formed on said substrate and configured to detect infrared light;
• and wherein
• said first plurality of pixels and said second plurality of pixels are arranged to define a sensor array having a plurality of rows and a plurality of columns, pixels of said second plurality being dispersed among said pixels of said first plurality in said sensor array;
• and
• each pixel of said second plurality includes a photodetector and a means for biasing a region of said substrate over said photodetector and for diminishing light in at least a portion of the visible spectrum.