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US 2018/0006067 A1Published application
Electromagnetic wave detector and electromagnetic wave detector array
AssigneeMitsubishi Electric Corporation
InventorsShimpei OGAWA, Daisuke FUJISAWA, Masaaki SHIMATANI
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Abstract
An electromagnetic wave detector includes: a substrate; an insulating layer provided on the substrate; a graphene layer provided on the insulating layer; a pair of electrodes provided on the insulating layer, with the graphene layer being interposed therebetween; and buffer layers interposed between the graphene layer and the electrodes to separate the graphene layer and the electrodes from each other. The electromagnetic wave detector array includes arrayed electromagnetic wave detectors that are the same as or different from each other.
Claims16
1-13. (canceled)
14:
- An electromagnetic wave detector comprising:
- a conductive substrate;
- an insulating layer provided on the substrate;
- a graphene layer provided on the insulating layer;
- a pair of electrodes provided on the insulating layer, with the graphene layer interposed between the pair of electrodes;
- and
- buffer layers interposed between the graphene layer and each of the electrodes respectively and separating the graphene layer and the electrodes from each other.
4 more elements
15:
- The electromagnetic wave detector according to claim 14, wherein each of the pair of electrodes is made of the same material.
16:
- The electromagnetic wave detector according to claim 14, wherein each of the pair of electrodes is made of a material different from the other.
17:
- The electromagnetic wave detector according to claim 14, wherein a Dirac point (DPe) which is different from a Dirac point in the graphene layer is formed between the graphene layer and the electrode.
18:
- The electromagnetic wave detector according to claim 14, wherein each of the electrodes is made of metal and each of the buffer layers is made of an oxide of the metal.
19:
- The electromagnetic wave detector according to claim 14, wherein a protective film is provided so as to cover the graphene layer and the buffer layers.
20:
- The electromagnetic wave detector according to claim 14, wherein, in the pair of electrodes, a size of an area where each of the electrodes faces the graphene layer across each of the buffer layers differs between the pair of electrodes.
21:
- The electromagnetic wave detector according to claim 14, wherein each of the buffer layers which are provided between the pair of electrodes and the graphene layer is made of a material different from the other.
22:
- The electromagnetic wave detector according to claim 14, wherein one of periodic recesses and periodic projections which cause surface plasmon resonance are formed on surfaces of the electrodes.
23:
- The electromagnetic wave detector according to claim 14, wherein one of periodic recesses and periodic projections which cause surface plasmon resonance are formed on a surface of the graphene layer.
24:
- The electromagnetic wave detector according to claim 22, wherein the periodic recesses include one of periodic holes which are arranged one-dimensionally or two-dimensionally, and one-dimensional grooves which are arranged side by side.
25:
- The electromagnetic wave detector according to claim 14, wherein the graphene layer includes one of a lamination structure of at least two graphene layers, a two-dimensional material, a lamination structure of two-dimensional materials, and a lamination structure of graphene and a two-dimensional material.
26:
- An electromagnetic wave detector array comprising the electromagnetic wave detectors according to claim 14, which are arranged in an array.
27:
- An electromagnetic wave detector array comprising the electromagnetic wave detectors each of which is according to claim 22, the electromagnetic wave detectors differing from one another and being arranged in an array.
28:
- An electromagnetic wave detector array comprising the electromagnetic wave detectors each of which is according to claim 25, the electromagnetic wave detectors differing from one another and being arranged in an array.