Interconnects for vertical-transport field-effect transistors

Abstract

Structures and fabrication methods for vertical-transport field-effect transistors. The structure includes a vertical-transport field-effect transistor having a source/drain region located in a semiconductor layer, a fin projecting from the source/drain region in the semiconductor layer, and a gate electrode on the semiconductor layer and coupled with the fin. The structure further includes an interconnect located in a trench defined in the semiconductor layer. The interconnect is coupled with the source/drain region or the gate electrode of the vertical-transport field-effect transistor, and may be used to couple the source/drain region or the gate electrode of the vertical-transport field-effect transistor with a source/drain region or a gate electrode of another vertical-transport field-effect transistor.

Dependencies are inferred from the claim text.