Semiconductor structure and a manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHEN-HUA YU, SUNG-FENG YEH, MING-FA CHEN
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHEN-HUA YU, SUNG-FENG YEH, MING-FA CHEN
Estimating the term…
A semiconductor structure includes a substrate including a first surface, a second surface opposite to the first surface and a recess extending from the first surface towards the second surface, a first die at least partially disposed within the recess and including a first die substrate and a first bonding member disposed over the first die substrate, a second die disposed over the first die and including a second die substrate and a second bonding member disposed a second die substrate and the second die substrate, a redistribution layer (RDL) disposed over the second die, and a conductive bump disposed over the RDL, wherein the first bonding member is disposed opposite to and is bonded with the second bonding member.
A semiconductor structure, comprising:
A semiconductor structure, comprising:
A method of manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.