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US 2018/0005849 A1Published application
Substrate treating apparatus
AssigneeSemes Co., Ltd.
InventorsJi-hwan LEE, Jungbong CHOI, Chan Young HEO, Pil Kyun HEO, Byung Man KANG
Life of this patent
Estimating the term…
Abstract
Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a spin head, a support shaft connected to a lower portion of the spin head to support the spin head, a pin located on an upper surface of the spin head to support the substrate and having a space in the interior thereof, and a nozzle member configured to supply a liquid to the substrate located on the spin head.
Claims11
A substrate treating apparatus comprising:
- a spin head;
- a support shaft connected to a lower portion of the spin head to support the spin head;
- a pin located on an upper surface of the spin head to support the substrate and having a space in the interior thereof;
- and
- a nozzle member configured to supply a liquid to the substrate located on the spin head.
2 more elements
A substrate treating apparatus comprising:
- a spin head;
- a support pin located on an upper surface of the spin head to support a bottom surface of the substrate;
- a chucking pin located in the spin head to support a side surface of the substrate and having a space in the interior thereof;
- a support shaft connected to a lower portion of the spin head to support the spin head;
- and
- a nozzle member configured to supply a liquid to the substrate located on the spin head.
3 more elements
A substrate treating apparatus comprising:
- a spin head;
- a support pin located on an upper surface of the spin head to support a bottom surface of the substrate and having a space in the interior thereof;
- a chucking pin located in the spin head to support a side surface of the substrate;
- a support shaft connected to a lower portion of the spin head to support the spin head;
- and
- a nozzle member configured to supply a liquid to the substrate located on the spin head.
3 more elements
Dependencies are inferred from the claim text.