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US 2018/0005820 A1Published application
Composition and method for forming a dielectric layer
AssigneesRamot at Tel-Aviv University Ltd., Tower Semiconductor Ltd.
InventorsSimon LITSYN, Gil ROSENMAN, Amir HANDELMAN, Yakov ROIZIN
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Abstract
A porous layer is described. The porous layer comprises a solidified sol-gel inorganic material having a distribution of nanometric voids, wherein at least some of nanometric voids are at least partially coated internally by carbon or a hydrophobic substance containing carbon.
Claims20
A method of forming a porous layer, comprising:
- coating a substrate with a composition comprising a sol-gel precursor and a mixture of discrete nanospheres in a medium that at least partially prevents assembly of said nanosphreres into supramolecular or colloidal structures, wherein said nanospheres comprising organic substance of biological origin, and wherein a variance in a size of said nanosphreres is less than 2 nm2;
- drying said composition;
- and
- treating said dried composition so as to decompose said nanospheres, thereby forming voids in said dried composition.
1 more element
Dependencies are inferred from the claim text.