System and method for performing nano beam diffraction analysis
AssigneeInternational Business Machines Corporation
InventorsMarc Adam BERGENDAHL, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
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Abstract
A system for performing nano beam diffraction (NBD) analysis, includes a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample, a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample, and a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.
Claims25
A system for performing nano beam diffraction (NBD) analysis, comprising:
- a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample;
- a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample;
- and
- a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.
A method of performing nano beam diffraction (NBD) analysis, comprising:
- preparing a transmission electron microscopy (TEM) sample;
- milling the TEM sample to remove a surface portion of the TEM sample;
- and
- performing NBD analysis on the milled TEM sample to acquire diffraction data.
A system for performing nano beam diffraction (NBD) analysis, comprising:
- a focused ion beam (FIB) device for preparing a parallel-sided transmission electron microscopy (TEM) sample;
- a broad beam ion mill for milling the TEM sample to remove a surface portion from two parallel sides of the parallel-sided TEM sample which has been damaged by the FIB device and expose an underlying surface, the removed surface portion comprising a thickness in a range from 1 nm to 45 nm;
- and
- a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data on the underlying surface, the strain analyzer using a TEM camera image resolution of at least 4000×4000 pixels to acquire the diffraction data, such that the diffraction data comprises a sensitivity which is less than 0.1%.
A method of performing nano beam diffraction (NBD) analysis, comprising:
- preparing a parallel-sided transmission electron microscopy (TEM) sample;
- milling the TEM sample to remove a surface portion from two parallel sides of the parallel-sided TEM sample which has been damaged by the preparing of the TEM sample and expose an underlying surface, the surface portion comprising a thickness in a range from 1 nm to 45 nm;
- and
- performing NBD analysis on the milled TEM sample to acquire diffraction data on the underlying surface, by using a TEM camera image resolution of at least 4000×4000 pixels, such that the diffraction data comprises a sensitivity which is less than 0.1%.
A method of performing strain analysis, comprising:
- performing a first NBD analysis on a milled TEM sample from a strained region of a structure to acquire diffraction data;
- performing a second NBD analysis on a milled reference TEM sample from an unstrained region of the structure to acquire reference diffraction data;
- and
- comparing the diffraction data from the first NBD analysis with the reference diffraction data from the second NBD analysis to determine an amount of strain in the milled TEM sample.
Dependencies are inferred from the claim text.