Multilayer x-ray source target
AssigneeGeneral Electric Company
InventorsYong Liang, Vance Scott Robinson, Thomas Robert Raber, George Theodore Dalakos
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Abstract
The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers.
Claims20
An X-ray source, comprising:
- an emitter configured to emit an electron beam;
- and
- a target configured to generate X-rays when impacted by the electron beam, the target comprising:
- at least one X-ray generating layer comprising X-ray generating material, wherein the X-ray generating material within each X-ray generating layer varies in density within the respective X-ray generating layer;
- and
- at least one thermally-conductive layer in thermal communication with each X-ray generating layer.
An X-ray source, comprising:
- a target configured to generate X-rays when impacted by an electron beam, the target comprising:
- one or more X-ray generating layers comprising X-ray generating material, wherein the X-ray generating material within each X-ray generating layer has a density profile that decreases in at least one direction;
- and
- at least one thermally-conductive layer in thermal communication with each X-ray generating layer.
A method for fabricating an X-ray source target, comprising:
- depositing X-ray generating material on an underlying surface to form an X-ray generating layer, wherein the X-ray generating material is deposited at one or both of different pressures or temperatures so as to have different densities at different depths within the X-ray generating layer;
- and
- depositing a thermally conductive layer on the X-ray generating layer to form a thermally conductive layer.
Dependencies are inferred from the claim text.