Vaporizer For Ion Source
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsCraig R. Chaney, David P. Sporleder
Life of this patent
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Abstract
A vaporizer with several novel features to prevent vapor condensation and the clogging of the nozzle is disclosed. The vaporizer is designed such that there is an increase in temperature along the path that the vapor travels as it flows from the crucible to the arc chamber. The vaporizer uses a nested architecture, where the crucible is installed within an outer housing. Vapor leaving the crucible exits through an aperture and travels along the volume between the crucible and the outer housing to the nozzle, where it flows to the arc chamber. In certain embodiments, the aperture in the crucible is disposed at a location where liquid in the crucible cannot reach the aperture.
Claims20
A vaporizer, comprising:
- a crucible in which a dopant material may be disposed, having an aperture passing through a sidewall of the crucible;
- an outer housing surrounding the crucible;
- a vapor channel disposed between the outer housing and the crucible, wherein the aperture is in communication with the vapor channel;
- and
- a gas nozzle attached to one end of the outer housing in communication with the vapor channel.
A vaporizer, comprising:
- a crucible in which a dopant material may be disposed;
- and
- an outer housing surrounding the crucible and having a gas nozzle;
- wherein the crucible is thermally isolated from the outer housing.
A vaporizer, comprising:
- a crucible in which a dopant material may be disposed, the crucible being cylindrical, sealed on two ends and having an aperture passing through a sidewall of the crucible;
- an outer housing surrounding the crucible, wherein a body of the outer housing is cylindrical;
- and
- a vapor channel disposed between the crucible and the outer housing, wherein the aperture is in communication with the vapor channel;
- wherein the outer housing comprises a first end and a second end opposite the first end, with a gas nozzle attached to the first end of the outer housing and in communication with the vapor channel.
Dependencies are inferred from the claim text.