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US 2018/0005791 A1Published application
High brightness boron-containing electron beam emitters for use in a vacuum environment
AssigneeKLA-Tencor Corporation
InventorsWilliam G. Schultz, Gildardo R. Delgado, Frances Hill, Edgardo Garcia Berrios, Rudy Garcia
Life of this patent
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Abstract
An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.
Claims20
An apparatus comprising:
- an emitter containing a metal boride material, wherein the emitter includes a frustoconical section with an at least partly rounded tip that is in the shape of a truncated sphere, and wherein the at least partly rounded tip has a radius to a curved outer surface of 1 μm or less.
A method comprising:
- providing an emitter containing a metal boride material, wherein the emitter includes a frustoconical section with an at least partly rounded tip that is in the shape of a truncated sphere, and wherein the at least partly rounded tip has a radius to a curved outer surface of 1 μm or less;
- applying an electric field to the emitter;
- and
- generating an electron beam from the emitter.
1 more element
A method comprising:
- removing material from a single crystal rod to form an emitter containing a metal boride material, wherein the emitter includes a frustoconical section with an at least partly rounded tip that is in the shape of a truncated sphere, and wherein the at least partly rounded tip has a radius to a curved outer surface of 1 μm or less.
Dependencies are inferred from the claim text.