Substrate defect inspection apparatus, method of adjusting sensitivity parameter value for substrate defect inspection, and non-transitory storage medium

A method of adjusting a sensitivity parameter value for substrate defect inspection used in a substrate defect inspection apparatus, configured to compare, for each pixel value of image data obtained by picking up an image of an entire front surface of a substrate being an inspection object, using reference pixel data made by associating each position and an allowable range of the pixel value, a deviation amount from the allowable range and a sensitivity parameter value being an allowable deviation amount when each pixel value is deviated from the allowable range corresponding to the position thereof, and determine the substrate to be a defective substrate when the deviation amount exceeds the sensitivity parameter value, the method comprising:

• a step of creating, at adjustment time of the sensitivity parameter value, reference pixel data to be used after the adjustment;
• a step of adjusting the sensitivity parameter value;
• a step of selecting a virtual inspection substrate which is used for adjusting the sensitivity parameter value and on which virtual inspection is to be performed by comparison with the reference pixel data, from among a plurality of substrates inspected earlier than the adjustment time of the sensitivity parameter value,
• a step of comparing, for each pixel value of the selected virtual inspection substrate, using the reference pixel data to be used after the adjustment, the deviation amount from the allowable range and the sensitivity parameter value before the adjustment when each pixel value is deviated from the allowable range corresponding to the position thereof;
• a step of updating the deviation amount as a new sensitivity parameter value when the deviation amount exceeds the sensitivity parameter value and a difference between the deviation amount and the sensitivity parameter value is equal to or less than a threshold value;
• and
• a step of performing the above steps in sequence on image data on the plurality of substrates inspected earlier, and, when the sensitivity parameter value being an object to be compared with the deviation amount has been updated, storing in a storage unit a finally updated sensitivity parameter value as the sensitivity parameter after the adjustment, using the updated sensitivity parameter value.

A non-transitory storage medium storing a computer program to execute a method of adjusting a sensitivity parameter value for substrate defect inspection in a substrate defect inspection apparatus,

• the method of adjusting a sensitivity parameter value for substrate defect inspection, configured to compare, for each pixel value of image data obtained by picking up an image of an entire front surface of a substrate being an inspection object, using reference pixel data made by associating each position and an allowable range of the pixel value, a deviation amount from the allowable range and a sensitivity parameter value being an allowable deviation amount when each pixel value is deviated from the allowable range corresponding to the position thereof, and determine the substrate to be a defective substrate when the deviation amount exceeds the sensitivity parameter value, comprising:
• a step of creating, at adjustment time of the sensitivity parameter value, reference pixel data to be used after the adjustment;
• a step of adjusting the sensitivity parameter value;
• a step of selecting a virtual inspection substrate which is used for adjusting the sensitivity parameter value and on which virtual inspection is to be performed by comparison with the reference pixel data, from among a plurality of substrates inspected earlier than the adjustment time of the sensitivity parameter value,
• a step of comparing, for each pixel value of the selected virtual inspection substrate, using the reference pixel data to be used after the adjustment, the deviation amount from the allowable range and the sensitivity parameter value before the adjustment when each pixel value is deviated from the allowable range corresponding to the position thereof;
• a step of updating the deviation amount as a new sensitivity parameter value when the deviation amount exceeds the sensitivity parameter value and a difference between the deviation amount and the sensitivity parameter value is equal to or less than a threshold value;
• and
• a step of performing the above steps in sequence on image data on the plurality of substrates inspected earlier, and, when the sensitivity parameter value being an object to be compared with the deviation amount has been updated, storing in a storage unit a finally updated sensitivity parameter value as the sensitivity parameter after the adjustment, using the updated sensitivity parameter value.