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AssigneeReno Technologies, Inc.
InventorsDaniel T. Mudd, Marshall B. Grill, Norman L. Batchelor, II
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In one embodiment, a modular method of making mass flow controllers for delivery of a plurality of process gases includes providing a plurality of monolithic bases, each of the monolithic bases having a plurality of flow component mounting regions. A first set of flow components are coupled to the flow component mounting regions of a first of the monolithic bases to form a mass flow controller having a first set of operating characteristics. A second set of flow components are coupled to the flow component mounting regions of a second of the monolithic bases to form a mass flow controller having a second set of operating characteristics which are different from the first set of operating characteristics.
A modular method of making mass flow controllers having different operating characteristics, the method comprising:
A modular method of making mass flow controllers having different operating characteristics, the method comprising:
A modular method of making mass flow controllers having different operating characteristics, the method comprising:
Dependencies are inferred from the claim text.