Illumination System for a Lithographic or Inspection Apparatus

An illumination system for a lithographic or inspection apparatus, the system comprising:

• a plurality of illumination sources;
• at least two different photoluminescent materials arranged to be illuminated by the plurality of illumination sources and to thereby emit output electromagnetic radiation, wherein the different photoluminescent materials have different emission spectral properties of the output electromagnetic radiation, and wherein illumination of different photoluminescent materials by the illumination sources is selectable to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output electromagnetic radiation;
• and
• a plurality of selectively configurable filters arranged to filter the output electromagnetic radiation in accordance with the selected illumination of the different photoluminescent materials.

An illumination system comprising:

• a microLED array;
• at least two different phosphors arranged to be illuminated by the microLED array and to thereby emit output light, wherein the different phosphors have different emission spectral properties of the output light and wherein illumination of different phosphors by the microLED array is selectable by selective activation of the microLED array and/or movement of the phosphors relative to the microLED array to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output light;
• and
• one or more filter wheel configurable to filter the output light in accordance with the selected illumination of the different phosphors.

An inspection apparatus comprising:

• a plurality of illumination sources;
• at least two different photoluminescent materials arranged to be illuminated by the plurality of illumination sources and to thereby emit output electromagnetic radiation, wherein the different photoluminescent materials have different emission spectral properties of the output electromagnetic radiation, and wherein illumination of different photoluminescent materials by the illumination sources is selectable to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output electromagnetic radiation;
• and
• a plurality of selectively configurable filters arranged to filter the output electromagnetic radiation in accordance with the selected illumination of the different photoluminescent materials.

A lithographic apparatus comprising:

• a plurality of illumination sources;
• at least two different photoluminescent materials arranged to be illuminated by the plurality of illumination sources and to thereby emit output electromagnetic radiation, wherein the different photoluminescent materials have different emission spectral properties of the output electromagnetic radiation, and wherein illumination of different photoluminescent materials by the illumination sources is selectable to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output electromagnetic radiation;
• and
• a plurality of selectively configurable filters arranged to filter the output electromagnetic radiation in accordance with the selected illumination of the different photoluminescent materials.

An inspection apparatus comprising:

• a microLED array;
• at least two different phosphors arranged to be illuminated by the microLED array and to thereby emit output light, wherein the different phosphors have different emission spectral properties of the output light and wherein illumination of different phosphors by the microLED array is selectable by selective activation of the microLED array and/or movement of the phosphors relative to the microLED array to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output light;
• and
• one or more filter wheel configurable to filter the output light in accordance with the selected illumination of the different phosphors.

A lithographic apparatus comprising:

• a microLED array;
• at least two different phosphors arranged to be illuminated by the microLED array and to thereby emit output light, wherein the different phosphors have different emission spectral properties of the output light and wherein illumination of different phosphors by the microLED array is selectable by selective activation of the microLED array and/or movement of the phosphors relative to the microLED array to provide different illumination of the different photoluminescent materials, so as to provide tunable spectral properties of the output light;
• and
• one or more filter wheel configurable to filter the output light in accordance with the selected illumination of the different phosphors.