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US 2018/0004082 A1Published application
Pellicle for photomask and exposure apparatus including the pellicle
AssigneeSamsung Electronics Co., Ltd.
InventorsHyunjae SONG, Hyeonjin SHIN
Life of this patent
Estimating the term…
Abstract
Provided are a pellicle for a photomask, which protects the photomask from external contamination and an exposure apparatus including the pellicle for the photomask. The pellicle for the photomask includes a pellicle membrane provided spaced apart from the photomask. The pellicle membrane includes a semiconductor having a two-dimensional (2D) crystalline structure.
Claims23
A pellicle for a photomask, which protects the photomask from external contamination, the pellicle comprising:
- a pellicle membrane spaced apart from the photomask;
- the pellicle membrane including a semiconductor having a two-dimensional (2D) crystalline structure.
A reticle comprising:
- a photomask;
- and
- a pellicle configured to protect the photomask from external contamination,
- wherein the pellicle includes a pellicle membrane, the pellicle membrane being spaced apart from the photomask, the pellicle membrane including a semiconductor having a two-dimensional (2D) crystalline structure.
1 more element
An exposure apparatus comprising:
- a light source configured to emit light;
- a photomask configured to perform an exposure process by using light emitted from the light source;
- and
- a pellicle configured to protect the photomask from external contamination,
- wherein the pellicle includes a pellicle membrane, spaced apart from the photomask and includes a semiconductor having a two-dimensional (2D) crystalline structure.
2 more elements
An exposure apparatus comprising:
- a beam source configured to emit a beam;
- a mask configured to perform an exposure process by using the beam emitted from the beam source;
- and
- a pellicle configured to protect the mask from external contamination;
- the pellicle including a pellicle membrane spaced apart from the mask, the pellicle membrane including a semiconductor having a two-dimensional (2D) crystalline structure.
2 more elements
23-30. (canceled)
Dependencies are inferred from the claim text.