Projection exposure device
AssigneeV Technology Co., Ltd.
InventorMichinobu Mizumura
Life of this patent
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Abstract
A projection exposure device projects exposure light onto a substrate via a microlens array. The projection exposure device includes a scanning exposure unit that moves the microlens array along a scanning direction from one end toward another end of the substrate, and a microlens array shift unit that moves the microlens array in a shift direction intersecting with the scanning direction during movement of the microlens array caused by the scanning exposure unit.
Claims4
A projection exposure device that projects exposure light onto a substrate via a microlens array, the projection exposure device comprising:
- a scanning exposure unit that moves the microlens array along a scanning direction from one end toward another end of the substrate;
- and
- a microlens array shift unit that moves the microlens array in a shift direction intersecting with the scanning direction during movement of the microlens array caused by the scanning exposure unit.
A projection exposure method, comprising:
- projecting exposure light onto a substrate via a microlens array;
- and
- moving the microlens array in a direction intersecting with a scanning direction upon performing a scanning exposure while moving the microlens array along the scanning direction from one end toward another end of the substrate.
Dependencies are inferred from the claim text.