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US 2018/0003951 A1Published application
Multi-mirror array
AssigneeCarl Zeiss SMT GmbH
InventorsJan Horn, Stefan Tuerk, Oscar Noordman, Ulrich Bihr
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Abstract
A multi-mirror array including displaceable mirror elements includes a passive electric damping mechanism for damping disturbances of the displacement positions of the mirror elements.
Claims20
A multi-mirror array, comprising:
- a multiplicity of displaceable mirror elements, each mirror element comprising a reflection area;
- a multiplicity of actuators configured to displace the mirror elements;
- and
- a multiplicity of passive electrical damping mechanisms configured to damp disturbances of displacement positions of the mirror elements,
- wherein:
- to displace one of the mirror elements, each actuator comprises an actuator electrode configured so that an actuation signal can be applied thereto via a signal line;
- each damping mechanism is connected in series with an actuator electrode;
- and
- the damping mechanisms comprise at least mechanism selected from the group consisting of antiparallel-connected diodes, switched capacitor structures and transistor circuits.
6 more elements
Dependencies are inferred from the claim text.