Sacrificial coupler for testing v-grooved integrated circuits
AssigneeInternational Business Machines Corporation
InventorsTymon Barwicz, William M.J. Green, Marwan H. Khater, Jessie C. Rosenberg
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Abstract
Embodiments are directed to a method of forming an optical coupler system. The method includes forming at least one waveguide over a substrate, and forming gratings in a first region over the substrate. The method further includes configuring the gratings to couple optical signals to or from the at least one waveguide, and forming a v-groove in the first region over the substrate, wherein forming the v-groove includes removing the gratings from the first region.
Claims25
A method of forming an optical coupler system, the method comprising:
- forming a first optoelectronic component over a substrate;
- forming a sacrificial optical coupler in a first region over the substrate;
- configuring the sacrificial optical coupler to couple optical signals to or from the first optoelectronic component;
- and
- forming a v-groove in the first region over the substrate;
- wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
A method of forming an optical coupler system, the method comprising:
- forming a first optoelectronic component over a substrate;
- forming a second optoelectronic component over the substrate;
- forming a first sacrificial optical coupler in a first region over the substrate;
- configuring the first sacrificial optical coupler to couple optical signals to or from the first optoelectronic component;
- configuring the first sacrificial optical coupler to couple optical signals to or from the second optoelectronic component;
- and
- forming a v-groove in the first region over the substrate;
- wherein forming the v-groove in the first region includes removing the first sacrificial optical coupler from the first region.
A method of forming an optical coupler system, the method comprising:
- forming a transmitter component over a substrate;
- forming a receiver component over the substrate;
- forming a first sacrificial optical coupler in a first region over the substrate;
- configuring the first sacrificial optical coupler to couple optical signals to or from the transmitter component;
- configuring the first sacrificial optical coupler to couple optical signals to or from the receiver component;
- and
- forming a v-groove in the first region over the substrate;
- wherein forming the v-groove in the first region includes removing the first sacrificial optical coupler from the first region.
An optical coupler system comprising:
- a first optoelectronic component formed over a substrate;
- a sacrificial optical coupler formed in a first region over the substrate;
- wherein the sacrificial optical coupler is configured to couple optical signals to or from the first optoelectronic component;
- and
- wherein the first region defines an area in which a v-groove will be formed during a subsequent fabrication operation of the optical coupler system.
Dependencies are inferred from the claim text.