Sacrificial grating coupler for testing v-grooved integrated circuits
AssigneeInternational Business Machines Corporation
InventorsTymon Barwicz, Jens Hofrichter, Marwan H. Khater, Jessie C. Rosenberg, William M.J. Green
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Abstract
Embodiments are directed to a method of forming an optical coupler system. The method includes forming at least one waveguide over a substrate, and forming a sacrificial optical coupler in a first region over the substrate. The method further includes configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide, and forming a v-groove in the first region over the substrate, wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
Claims25
A method of forming an optical coupler system, the method comprising:
- forming at least one waveguide over a substrate;
- forming a sacrificial optical coupler in a first region over the substrate;
- configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide;
- and
- forming a v-groove in the first region over the substrate;
- wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
A method of forming an optical coupler system, the method comprising:
- forming at least one waveguide over a substrate;
- forming a sacrificial optical coupler in a first region over the substrate;
- configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide;
- performing a test operation comprising coupling optical signals through the sacrificial optical coupler to or from the at least one waveguide;
- and
- forming a v-groove in the first region over the substrate;
- wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
A method of forming an optical coupler system, the method comprising:
- forming at least one waveguide over a substrate;
- forming a sacrificial optical coupler in a first region over the substrate;
- configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide;
- performing a test operation comprising coupling optical signals through the sacrificial optical coupler to or from the at least one waveguide;
- and
- subsequent to performing the test operation, forming a v-groove in the first region over the substrate;
- wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
An optical coupler system comprising:
- at least one waveguide formed over a substrate;
- a sacrificial optical coupler formed in a first region over the substrate;
- wherein the sacrificial optical coupler is configured to couple optical signals to or from the at least one waveguide;
- and
- wherein the first region defines an area in which a v-groove will be formed during a subsequent fabrication operation of the optical coupler system.
An optical coupler system comprising:
- at least one waveguide formed over a substrate;
- sacrificial gratings formed in a first region over the substrate;
- wherein the sacrificial gratings are configured to couple optical signals to or from the at least one waveguide;
- wherein the first region defines an area in which a v-groove will be formed during a subsequent fabrication operation of the optical coupler system;
- and
- wherein removing the subsequent fabrication operation comprises one or more etch operations.
Dependencies are inferred from the claim text.