Radiation detector, method of manufacturing radiation detector, and imaging apparatus
AssigneeSony Corporation
InventorsTAKAHIRO IGARASHI, YUSUKE OYAMA, SHUSAKU YANAGAWA
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Abstract
A radiation detector includes a substrate, a plurality of device sections each disposed separately from the substrate and each including a photoelectric conversion device, a buried layer formed in a region between the device sections, and a wavelength conversion layer that is formed on the plurality of device sections and converts entered radiation into light. Any of the device sections includes a first surface that faces the wavelength conversion layer, and a second surface that faces the substrate, and an upper end of the buried layer is disposed at a position higher than the second surface of the any of the device sections.
Claims16
A radiation detector comprising:
- a substrate;
- a plurality of device sections each disposed separately from the substrate and each including a photoelectric conversion device;
- a buried layer formed in a region between the device sections;
- and
- a wavelength conversion layer that is formed on the plurality of device sections and converts entered radiation into light,
- any of the device sections including
- a first surface that faces the wavelength conversion layer, and
- a second surface that faces the substrate, and
- an upper end of the buried layer being disposed at a position higher than the second surface of the any of the device sections.
A radiation detector comprising:
- a substrate;
- a plurality of device sections each disposed separately from the substrate and each including a photoelectric conversion device;
- and
- a wavelength conversion layer that is formed on the plurality of device sections and converts entered radiation into light,
- any of the device sections including
- a first surface that faces the wavelength conversion layer, and
- a second surface that faces the substrate, and
- a light shielding film being formed on the second surface of the any of the device sections or a surface of the substrate.
A radiation detector comprising:
- a substrate;
- a plurality of device sections each disposed separately from the substrate and each including a photoelectric conversion device;
- and
- a wavelength conversion layer that is formed on the plurality of device sections and converts entered radiation into light,
- the wavelength conversion layer including
- a first layer divided for each of the device sections, and
- a second layer formed on the first layer and common to the plurality of device sections.
An imaging apparatus with a radiation detector and a driving section that drives the radiation detector, the radiation detector comprising:
- a substrate;
- a plurality of device sections each disposed separately from the substrate and each including a photoelectric conversion device;
- a buried layer formed in a region between the device sections;
- and
- a wavelength conversion layer that is formed on the plurality of device sections and converts entered radiation into light,
- any of the device sections including
- a first surface that faces the wavelength conversion layer, and
- a second surface that faces the substrate, and
- an upper end of the buried layer being disposed at a position higher than the second surface of the any of the device sections.
A method of manufacturing a radiation detector, the method comprising:
- forming a plurality of device sections on a substrate, each of the device sections being disposed separately from the substrate and including a photoelectric conversion device;
- and
- forming a wavelength conversion layer on the device sections, the wavelength conversion layer converting entered radiation into light,
- the wavelength conversion layer including
- a first layer divided for each of the device sections, and
- a second layer formed on the first layer and common to the plurality of device sections.
Dependencies are inferred from the claim text.