Piezoelectric package-integrated chemical species-sensitive resonant devices

A package substrate comprising:

• a plurality of organic dielectric layers and a plurality of conductive layers to form the package substrate;
• a cavity formed in the package substrate;
• and
• a piezoelectric chemical species-sensitive device integrated within the package substrate, the piezoelectric chemical species-sensitive device including an input transducer to receive input signals, a cantilever base structure that is positioned in proximity to the cavity, a chemically sensitive functionalization material attached to the cantilever base structure and an output transducer to generate output signals, wherein for a chemical sensing functionality a desired chemical species attaches to the chemically sensitive functionalization material which causes a change in mass of the cantilever base structure and this change in mass causes a change in a mechanical resonant frequency of the piezoelectric chemical species-sensitive device.

A chemical species-sensitive resonator, comprising:

• an input transducer having a piezoelectric material to receive input signals and to generate surface acoustic waves on a surface of a package substrate having organic material in response to deformation of the piezoelectric material;
• a chemically sensitive functionalization material communicatively coupled to the input transducer;
• and
• an output transducer to generate output signals in response to receiving the surface acoustic waves, wherein for a chemical sensing functionality a desired chemical species attaches to the chemically sensitive functionalization material which causes a change in mass and this change in mass causes a change in a resonant frequency of the resonator.