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US 2018/0003664 A1Published application
Measuring electrode and measuring system for chemical liquid
AssigneeHoriba, Ltd.
InventorsKazuhiro Miyamura, Koji Ueda
Life of this patent
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Abstract
A measuring electrode for chemical liquid in semiconductor process that measures a chemical liquid used for a semiconductor process comprises a first body having a first internal liquid chamber into which a first internal liquid is filled, and a flow tube for a part or all of which a responsive glass is used and that forms a flow channel where a chemical liquid as being a measuring object flows, wherein the flow tube is so arranged to penetrate the first body and the responsive glass makes contact with the first internal liquid in the first internal liquid chamber.
Claims4
A reference electrode comprising;
- a body having an internal liquid chamber into which an internal liquid is filled and being configured so that the internal liquid makes contact with a measuring liquid as being a measuring object flowing above the internal liquid through a liquid junction arranged at an upper end part of the internal liquid chamber and
- an internal electrode arranged so as to contact with the internal liquid in the internal liquid chamber,
- wherein a replenishing port to replenish the internal liquid into the internal liquid chamber is arranged below the upper end part of the internal electrode.
Dependencies are inferred from the claim text.